日立推出JSM-7800FPRIME场发射电子显微镜

The Introduction of JSM-7800F GBSH.

SHUNSUKE ASAHINA

JEOL Ltd

Recently, we have successfully developed the ultimate high-resolution low voltage FE-SEM (LVSEM) which is called the JSM-7800F Prime. The JSM-7800F Prime has made it possible to achieve 0.8 nm at 1kV using both Super Hybrid Lens (SHL) and Gentle Beam (GB) techniques1.

Nowadays, most nano structural materials are very sensitive to electron beams. In such nano structural material observations, we have to reduce the acceleration voltage or probe current to minimize the damage by the electron beam. However, the beam diameter at low acceleration voltage is getting larger because of chromatic aberration and spherical aberration. To produce a tiny probe at a low acceleration voltage, we applied a high voltage on the specimen holder, such as 5 kV. This unique technique is called Gentle Beam Super High (GBSH) and has already produced excellent high spatial resolution images on Metal Organic Frameworks (MOFs) and Zeolite nanosheets, which have been published in “Science”2,3. In this session, we will talk about the structure of JSM-7800F Prime and its applications.

“ The Image of Gold at porous Carbon”

Fine meso pore of carbon are clearly observed at 300 eV (Specimen bias: 5 kV).

Courtesy of Prof Ferdi Schüth, Max Planck Institute für Kohlenforschung

Reference

1) Shusuke Asahina et al,. EMC 2012 proceeding advanced in SEM.

2) Hexiang Deng et al,. Science (2012) Vol. 336 no. 6084 pp. 1018-1023

3) Xueyi Zhang et al,. Science (2012) Vol. 336 no. 6089 pp. 1684-1687