日立推出新型台式大气压扫描电镜AeroSurf 1500 可在大气压下直接观察含水物质

Hitachi High-Tech Announces a New Tabletop Atmospheric Scanning Electron Microscope, AeroSurf 1500, for observation of wet specimens at atmospheric pressure

TOKYO, Japan, March 7, 2016 – Hitachi High-Technologies Corporation (TSE: 8036, Hitachi High-Tech) has announced the release of the new tabletop atmospheric scanning electron microscope (ASEM), AeroSurf 1500, in the U.S.A. The AeroSurf 1500 accommodates the observation of high-moisture specimens, such as soft materials and biological specimens, in their natural state.

Tabletop Atmospheric Scanning Electron Microscope AeroSurf 1500

With a conventional SEM, specimens with high-moisture content need to be dehydrated and dried so that they will not deform while under vacuum. Such complicated preprocessing often causes alterations to specimens. A popular approach to observe high-moisture specimens is a cryogenic method； however, cryogenic systems can be costly and not readily accessible.

Hitachi High-Tech, a leading provider of electron microscopes, responded to the diversity of our customers’ requirements and developed the AeroSurf 1500.

The AeroSurf 1500 enables SEM observation of high-moisture specimens at an atmospheric pressure, not under vacuum. The specimen chamber and the SEM column are separated by a membrane which isolates the high-vacuum column from the atmospheric specimen chamber while allowing electron beam irradiation of the specimen. This greatly reduces the need for time-consuming preprocessing of high-moisture specimens. The use of this membrane is optional, allowing both atmospheric and traditional SEM analysis with one instrument.

The AeroSurf 1500 is ideal for observing high-moisture specimens during the drying process.

Hitachi High-Tech introduces the AeroSurf 1500 at the Pittsburgh Conference & Exposition 2016 (Pittcon 2016), held at the Georgia World Congress Center in Atlanta, U.S.A, from Sunday, March 6 through Thursday, March 10, 2016.

主要应用

SEM observation of high-moisture specimens at an atmospheric pressure without preprocessing

SEM observation under a wide range of pressures from low vacuum (several Pa) to atmosphere (105 Pa)

ES-Corrector equipped for wide scatter signal discrimination and enhanced image quality

A compact design (330 mm wide) minimizes system footprint

EDS analysis optionally available (vacuum mode)

主要参数

项目	内容
电子枪	预对中灯丝
检测系统	高灵敏度4分割半导体背散射电子检测器
加速电压	5 kV/15 kV
倍率	×15～×60,000（使用数码变焦时：×240,000）
观察压力	大气压模式（105 Pa）（装有隔膜时）
	负压模式（约103 Pa～105 Pa）（装有隔膜时）
	低真空模式（数 Pa～数10 Pa）（拆下隔膜时）
最大样品尺寸	直径55 mm
大小和重量	主机：330（W）×687（D）×565（H）mm, 67.0 kg（手动操作台）
	控制装置：220（W）×368（D）×235（H）mm, 11.8 kg
	隔膜泵：145（W）×256（D）×217（H）mm, 4.5 kg ×2台