CVI反射镜 （高质量高损伤阈值反射镜）

窄带部分反射镜

PR1

190-2100

30-90%

12.7-50.8

λ/10

10-5

20 J/cm2, 20ns, 20Hz   at 1064nm,
10 MW/cm2 at 1064nm

窄带可调全反镜

TLM1

190-2100

R ≥ 99.0% at 0°
R ≥ 98.5% at 45°, P-Pol
R ≥ 99.0% at 45°, UNP
R ≥ 99.5% at 45°, S-Pol

12.7-101.6

λ/10

10-5

20 J/cm2, 20ns, 20Hz   at 1064nm,
10 MW/cm2 at 1064nm

光纤全反镜

FLM

343, 515,

1030, 1064,
   1070, 1550nm

R ≥ 99.0% at 0°
R ≥ 99.0% at 45°, UNP

12.7-50.8

λ/10

10-5

20 J/cm2, 20ns, 20Hz   at 1064nm,
10 MW/cm2 at 1064nm

准分子全反镜

ARF

193

R ≥ 97% at 0°
R ≥ 96.0% at 45° UNP

25.4-76.2

λ/10

10-5

1 J/cm2, 20ns pulse at   193nm

KRF

248

R ≥ 99.5% at 0°
   R ≥ 99.0% at 45°, UNP

25.4-76.2

λ/10

10-5

3 J/cm2, 8ns pulse at   248nm

YAG全反镜

Y5

213

R ≥ 97.0% at 0°
R ≥ 97.0% at 45°, UNP

12.7-50.8

λ/10

10-5

3 J/cm2, 8ns pulse at 248nm

Y4

262-266

R ≥ 99.9% at 0°
R ≥ 99.6% at 45°, P-Pol
R ≥ 99.8% at 45°, UNP
R ≥ 99.9% at 45°, S-Pol

12.7-101.6

λ/10

10-5

10 J/cm2, 20ns, 20Hz   at 266nm

Y3

349-355

R ≥ 99.9% at 0°
R ≥ 99.6% at 45°, P-Pol
R ≥ 99.8% at 45°, UNP
R ≥ 99.9% at 45°, S-Pol

12.7-101.6

λ/10

10-5

15 J/cm2, 20ns, 20Hz   at 355nm

Y2

523-532

R ≥ 99.9% at 0°
R ≥ 99.6% at 45°, P-Pol
R ≥ 99.8% at 45°, UNP
R ≥ 99.9% at 45°, S-Pol