光谱重复性:<0.1cm-1
空间分辨率:<10nm
最低波数:50cm-1
光谱分辨率: 1cm-1
光谱范围:50-9000cm-1
SmartSPM Scanner and Base扫描仪和基座
样品扫描范围:100 µm x 100 µm x 15 µm (±10 %)
Scanning type by sample XY non-linearity 0.05 %; Z non-linearity 0.05 %
噪声Noise
0.1 nm RMS in XY dimension in 200 Hz bandwidth with capacitance sensors on
0.02 nm RMS in XY dimension in 100 Hz bandwidth with capacitance sensors off
< 0.04 nm RMS Z capacitance sensor in 1000 Hz bandwidth
共振频率Resonance frequency
XY 7 kHz (unloaded)
Z 15 kHz (unloaded)
X, Y, Z轴向运动 movement
Digital closed loop control for X, Y, Z axes
WWActive elimination of XY phase lag, overshooting and ringing results in fast scanning without any dynamic image distortion
Motorized Z approach range 18 mm
样品尺寸zei大:40 x 50 mm, 15 mm厚
Sample positioning Motorized sample positioning range 5 x 5 mm
定位分辨率:1 µm
AFM 探头Head
激光波长1300 nm, non-interfering with spectroscopic detector
Alignment Fully automated cantilever and photodiode alignment
Probe access Free access to the probe for additional external manipulators and probes
SPM测量模式 Measuring Modes
Contact AFM in air/(liquid optional)
Conductive AFM (optional)
Nanolithography
Semicontact AFM in air/(liquid optional)
Magnetic Force Microscopy (MFM)
Nanomanipulation
Non contact AFM
Kelvin Probe (Surface Potential Microscopy, SKM, KPFM)
STM (optional)
Phase Imaging
Capacitance and Electric Force Microscopy (EFM)
Photocurrent Mapping (optional)
Lateral Force Microscopy (LFM)
Force curve measurements
Volt-ampere characteristic measurements (optional)
Force Modulation Piezo Response Force Microscopy (PFM)
光谱模式Spectroscopy Modes
Confocal Raman, Fluorescence and Photoluminescence imaging and spectroscopy
Tip-Enhanced Fluorescence (TEFS)
Tip-Enhanced Raman Spectroscopy (TERS) Near-field Optical Scanning Microscopy and Spectroscopy (NSOM/SNOM)
导电AFM单元(选项)Conductive AFM Unit (optional)
电流范围Current range
100 fA ~ 10 µA
3 current ranges (1 nA, 100 na and 10 µA) switchable from the software
可选附件Optical Access
Capability to use simultaneously top and side plan apochromat objectives
Up to 100x, NA = 0.7 from top or side
Up to 20x and 100x simultaneously
Cloosed loop piezo objective scanner for ultra stable long term spectroscopic laser alignment
范围:20 µm x 20 µm x 15 µm
分辨率: 1 nm
光谱仪Spectrometer
Fully automated XploRA Plus* compact micro-spectrometers,functional as stand-alone micro-Raman microscope
波长范围:50 cm -1 ~ 4000 cm -1
光栅:4 gratings on computer controlled turret (600, 1200, 1800 and 2400 g/mm)
自动化:Fully motorized, software controlled operation
检测Detection
Full range of CCD detectors and EMCCDs
激光源Laser Sources
Typical wavelength 532 nm, 638 nm, 785 nm. Other wavelengths available on request.
自动化Automation
Fully automated laser and filter switching for up to 3 simultaneous lasers
Laser polarization selection and spectral analyzer options for all wavelengths
软件Software
Integrated software package including full featured SPM, spectrometer and data acquisition control, spectroscopic and SPM data analysis and processing suite, including spectral fitting, deconvolution and filtering, optional modules include univariate and multivariate analysis suite (PCA, MCR, HCA, DCA), particle detection and spectral search functionalities.
Scanning type by sample XY non-linearity 0.05 %; Z non-linearity 0.05 %
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