L95 电子工业生产设备综合 标准查询与下载
共找到 61 条与 电子工业生产设备综合 相关的标准，共 5 页
本文件规定了集成电路用全自动装片机的结构、分类、基本参数、工作条件、要求、试验方法、检验规则、标志、包装、运输和储存。 本文件适用于集成电路封装用全自动装片机。
Integrated circuit full automatic die bonder
- ICS
- 31.220
- CCS
- L95
- 发布
- 2021-12-31
- 实施
- 2022-07-01 00:00:00.0
本文件规定了集成电路(IC)制造设备的基本和常用术语,包括基础术语,晶体生长加工设备、掩模制造设备、光刻与刻蚀设备、掺杂设备、薄膜淀积设备、清洗设备、封装设备、检测设备的术语及公用部件术语。 本文件适用于集成电路制造设备的设计开发、生产和应用,也适用于集成电路制造设备的科研、教学和出版工作。
Terminology for integrated circuit（IC）manufacturing equipment
- ICS
- 31.220
- CCS
- L95
- 发布
- 2021-10-11
- 实施
- 2022-05-01 00:00:00.0
Laser lift-off equipment used for GaN
- ICS
- 31-550
- CCS
- L95
- 发布
- 2019-06-04
- 实施
- 2019-10-01 00:00:00.0
Equipment for preparation of nitride semiconductor materials by hydride vapor phase epitaxy
- ICS
- 31.220
- CCS
- L95
- 发布
- 2018-09-17
- 实施
- 2019-01-01 00:00:00.0
本标准规定了为保证半导体生产设施与用于生产半导体器件的设备能一起可靠运行的电磁兼容性(EMC)要求。本标准适用于生产半导体器件的设施和设备,这些设施和设备涵盖所有的设施警报、安全、通信与控制系统、工艺设备、测量设备、自动化设备以及信息技术设备。本标准不适用于集成电路的封装与功能测试所采用的设备和设施,也不适用于可能在半导体生产过程中产生的静电。
Requirements for semiconductor manufacturing facility electromagnetic compatibility
- ICS
- 31.550
- CCS
- L95
- 发布
- 2013-12-17
- 实施
- 2014-04-15
本标准给出了半导体制造设备(SME)在供应商工厂的最终装配(总装)、包装、运输以及在客户洁净室生产区的拆包和安放等特定活动指南。本标准适用于半导体制造设备、独立的组件和部件在供应商工厂的最终装配(总装)、包装和运输以及从客户装货码头/接收区到高纯和超高纯应用的洁净室生产区的转移过程。本标准不包含与环境、健康和安全(EHS)相关的特殊要求,也不适用于与晶片粒子或晶片质量(如离子污染度)相关的加工过程规范。
Guide for final assembly, packaging, transportation, unpacking, and relocation of semiconductor manufacturing equipment
- ICS
- 31.550
- CCS
- L95
- 发布
- 2013-11-12
- 实施
- 2014-04-15
本规范规定了所有光掩模上使用的对准标记的形状、尺寸范围和一般位置。 本规范适用于光掩模。
Specification for registration marks for photomasks
- ICS
- 31.200
- CCS
- L95
- 发布
- 1996-09-09
- 实施
- 1997-05-01
Plastic auto-molding system for integrated circuits
- ICS
- ICS 31-550
- CCS
- L95
- 发布
- 2019-11-11
- 实施
- 2020-04-01
Technical requirements for inspection of complete sets of equipment for the imported electronics and electrical industry Part 4: Semiconductor packaging and testing equipment
- ICS
- 31-550
- CCS
- L95
- 发布
- 2016-08-23
- 实施
- 2017-03-01
General specification for spray coating equipment
- ICS
- 31.550
- CCS
- L95
- 发布
- 2016-01-15
- 实施
- 2016-06-01
Integrated circuit automatic punching and forming equipment
- ICS
- 31.550
- CCS
- L95
- 发布
- 2016-01-15
- 实施
- 2016-06-01
Automatic grinding wheel dicing machine
- ICS
- 31.550
- CCS
- L95
- 发布
- 2016-01-15
- 实施
- 2016-06-01
Electronic catalog — Part 1: Specification of product attributes
- ICS
- 35.040
- CCS
- L95
- 发布
- 2014-12-31
- 实施
- 2014/12/31
Environmental Engineering (EE) - European telecommunication standard for equipment practice - Part 3: Engineering requirements for miscellaneous racks and cabinets (Endorsement of the English version EN 300 119-3 V2.2.2 (2010-01) as German standard)
- ICS
- 33.040.30
- CCS
- L95
- 发布
- 2012-12
- 实施
This Standard applies to electrical and electronic equipment (see definition 3.20) associated with semiconductor fabrication equipment (see definition 3.28) for the manufacture,measurement,assembly,and test of semiconductors.
Safety of machinery -- Electrical equipment of machines -- Part 33: Requirements for semiconductor fabrication equipment
- ICS
- 13.110;25.040.30;29.020
- CCS
- L95
- 发布
- 2012-05-21
- 实施
- 2012-05-21
이 표준은 법규 요구사항 및 조직이 동의한 그 밖의 요구사항과 중대한 녹색경영 측면에 대한
Green management system－Part 1：Requirement with guidance for use
- ICS
- 13.020.10
- CCS
- L95
- 发布
- 2011-07-05
- 实施
- 2011-07-05
이 표준은 법규 요구사항 및 조직이 동의한 그 밖의 요구사항과 중대한 녹색경영 측면에 대한
Green management system－Part 2：Green management performance evaluation
- ICS
- 13.020.10
- CCS
- L95
- 发布
- 2011-07-05
- 实施
- 2011-07-05
1.1 Scope. This standard applies to semiconductor fabrication facilities and comparable fabrication processes, including research and development areas in which hazardous chemicals are used, stored, and handled and containing what is herein defined as a cleanroom or clean zone, or both.
Standard for the Protection of Semiconductor Fabrication Facilities
- ICS
- 13.040.35;13.220.99
- CCS
- L95
- 发布
- 2011
- 实施
이 표준은 반도체의 제조(공정), 측정, 조립 및 시험을 위한 반도체 제조장비와 관련된 기
Safety guideline for semiconductor fabrication equipment
- ICS
- 31.080
- CCS
- L95
- 发布
- 2010-09-10
- 实施
- 2010-09-10
이 표준은 전해질 수용액 및 물(하천수, 해수, 우수, 증류수, 탈이온수 등)의 5 &am
General rules for electrical conductivity measuring method
- ICS
- 17.220.20
- CCS
- L95
- 发布
- 2009-12-18
- 实施
- 2009-12-18
