日本电子发布JSM-IT500系列新型扫描电镜

JEOL Ltd. (President Gon-emon Kurihara) announces the release of a new scanning electron microscope (SEM), the JSM-IT500 series, to be released in March 2017.

Product development background

Scanning electron microscopes are used in a wide range of fields, such as nanotechnology, metals, semiconductors, ceramics, medicine, and biology. In addition, SEM applications are expanding to not only basic research, but also quality control at manufacturing sites. With this, demands for faster and easier data acquisition of both SEM images and analysis results, such as energy dispersive X-ray spectroscopy (EDS) spectra, are increasing.

Built off of the highly successful and award winning predecessor of our InTouchScope™ series SEMs, the JSM-IT500 series was developed to meet these increasing demands in the market place. The JSM-IT500 series breaks through the conventional general-purpose SEM in terms of throughput, approximately 35% higher than our InTouchScope™ series, enabling significantly faster and easier analyses.

Main Features

Integration of SEM and EDS system

Further integration of SEM and EDS system enables seamless operation form observation to analysis.

New "Zeromag" function

With our Zeromag function, sample navigation is even easier than ever. You can locate areas for imaging or specify analysis positions over multiple fields using an optical image or holder graphic.

New "Live Analysis" function

With our Analytical series (“Live Analysis”), the embedded EDS system shows a real time EDS spectrum during image observation for efficient elemental analysis.

"SMILE VIEW™ Lab" for integrated management of image and analysis data

All data from collected SEM images to elemental analysis results are integrated to facilitate fast report generation.

Specimen Exchange Navi

Guided operation from specimen introduction to image observation.

Main Specifications

JSM-IT500 series can be equipped in the following 4 configurations: BU (Base Unit) / A (Analysis) / LV (Low Vacuum) / LA (Low Vacuum & Analysis)

Resolution	HV mode :  3.0 nm (30 kV)  15.0 nm (1.0 kV) LV mode : 4.0 nm (30 kV with Backscattered electron image)
Direct magnification	x 5 to x 300,000 (Defined with a display size of 128 mm x 96 mm)
Displayed magnification	x 14 to x 839,724 (Defined with a display size of 358 mm x 269 mm)
Electron gun	Tungsten (W) filament
Accelerating voltage	0.3 kV to 30 kV
Probe current	1 pA to 1 μA
LV pressure adjustment	10 to 650 Pa
Automatic functions	Filament adjustment, Gun alignment, Focus / Stigmator / Brightness / Contrast
Maximum specimen size	200 mm diameter, 90 mm height
Specimen stage	Large eucentric type X: 125 mm  Y: 100 mm  Z: 80 mm  Tilt: -10° to 90°  Rotation: 360°
Standard recipe	Built-in (includes EDS conditions)
Image mode	Secondary electron image, REF image, Compositional image, Topographic image, Stereo-microscopic image
EDS functions	Spectral analysis, Qualitative & Quantitative analysis, Line analysis (horizontal line, specific direction line), Elemental mapping, Probe tracking

Note: Specification and a photo of the instrument are those of JSM-IT500(LA).

Annual unit sales target

200 units/year