RF-120系列高频电源

• RF-120系列高频电源

• 是溅射、刻蚀、CVD、离子镀等薄膜制备/加工使用的、用于生成等离子体的13.56MHz高频电源（RF电源）。

特性：

A high-frequency power supply (RF power supply) creating 13.56 MHz plasma for thin-film processing and etching, including sputtering, etching, CVD, and ion plating.

The RF-120 series includes DeviceNet, RS232C, and analog interfaces as standard. These are multi-functional powers supplies that offer performance like pattern operation, arcing cut/count functions, and recall of past data. There is also a matching network to facilitate the combination of each power supply and connected device.

功能：

• Pattern operation
  Automatic output control based on output and time data preset in the RF power supply
  Up to 3 patterns with a maximum of 5 points per pattern can be set

• Arcing cut

• Arcing count
  Counts the number of times that arcing occurs, and halts output when a preset number is reached

• Pulse operation (option)
  Pulse frequency: 100 Hz ~ 10 kHz, duty: 20 ~ 80%
  *A pulse-generator must be purchased separately

• Synchronous operation
  Can be connected to other RF power supplies and operated synchronously

• Slow-start / Slow down

• Reflectance limit continuation control
  When the reflected power limiter is triggered, the elapsed time is measured and when the specified amount of time is reached, output is halted

• Past data memory
  When an abnormality occurs, the internal data from the prior 30 seconds is output

• Matching completion confirmation
  When the reflected power is less than the specified value, a confirmation signal is output

• Arcing cut operation confirmation

• Limiter operation confirmation

• Incident/ Reflected power monitor output

• Input power supply confirmation

• RF output confirmation

• Error check signal output

• Various interfaces supported as standard
  DeviceNet, RS232C, analo

• CE mark compliant (excluding some devices)

选项功能

• Manual operation board  (RF-56000)

• Out-of-phase signal generator (Phase Shifter)

• Water-cooled input terminal (for ion plating)

应用案例

产品规格：

*RF-12040由单元1（149mmH/25kg）和单元2（199mmH/30kg）构成。
*外观尺寸不包括突起部分（背面的风扇等）。RF-56000  外观尺寸 ： 105mm(W)×305mm(D)×145mm(H)

RF-120系列高频电源信息由日本电子株式会社(JEOL)为您提供，如您想了解更多关于RF-120系列高频电源报价、型号、参数等信息，欢迎来电或留言咨询。

注：该产品未在中华人民共和国食品药品监督管理部门申请医疗器械注册和备案，不可用于临床诊断或治疗等相关用途