RF-340 系列匹配网络自动整合装置

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Features特点

RF-340 series Matching Network

An automatic matching device to match the load to the 13.56 MHz RF power supply for plasma generation. Matching box + Controller

Functions功能

Preset (8 point)

Records the settings of each of the variable capacitors for the points that have been matched.

Auto-preset

Auto control driving the variable capacitors to the preset settings when output is zero, and then outputting the RF

Auto-delay

No immediate reaction to sudden changes in the load, such as arcing, with automatic operation after a specified　period of time has elapsed.

Variable capacitor position display

Variable capacitor drive range setting

Control of the variable capacitor drive range setting during automatic operation

Vdc display

Vdc meter relay

Vdc stabilization control

Vpp display

Vpp meter relay

Load impedance display

When matching is obtained, the plasma impedance is calculated and displayed

CE compliant （excluding some devices）

技术规格：

Matching box匹配箱
		RF-34021	RF-34031	RF-34041
Permitted transmitted power		1.5kW	3kW	6kW
Input connector		N type	LS2 type
Frequency		13.56MHz
Input impedance		50 Ω
Fan power supply		DC 24V (supplied from the controller)
Matching control		Vacuum variable capacitor
Tuning control		Vacuum variable capacitor
Residual reflected power		Within 10% of the input power
Cooling method		Water (2～3L/min)	Water (2.5～3L/min)
Dimensions (mm)	Width	370	470
	Depth	300	370
	Height	205	246
Mass (kg)		15	19
Controller
Input power		DC 24V, 4A ( to be provided separately )
Dimensions (mm)		140 (W) × 305 (D) × 145 (H)
Control method		Digital control
Mass		1.5kg

RF-340 系列匹配网络自动整合装置信息由日本电子株式会社(JEOL)为您提供，如您想了解更多关于RF-340 系列匹配网络自动整合装置报价、型号、参数等信息，欢迎来电或留言咨询。

注：该产品未在中华人民共和国食品药品监督管理部门申请医疗器械注册和备案，不可用于临床诊断或治疗等相关用途

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