森泉光电有限公司

400-6699-1171000

分析测试百科网 认证会员,请放心拨打!

热门搜索:
首页 > 产品展示 >  > TMC 数字精密电子定位系统PEPS II

TMC 数字精密电子定位系统PEPS II

分享:
咨询留言
参考报价: 面议 型号: PEPS II
品牌: TMC 产地: 美国
关注度: 12 信息完整度:
样本: 暂无样本 典型用户: 暂无
产地属性美洲价格范围1万-3万

数字精密电子定位系统

peps®II是在TMC的专利peps®(精密电子定位系统)基础上建立的并进行了改善。通过添加一个新的数字控制器使pep®II的使用更简单,提供了更多的功能,并且具有改进的用户界面。peps®II是用于TMC气浮隔振系统的数字式非接触高度控制系统。这种系统通常包含机械高度阀和机械高度传感装置,其应用范围从用于半导体制造设备提高沉降时间和增加产量,到要求最优噪声性能和稳定的平台的精密实验室环境。

 

特性和好处
?数字控制,用户友好的LCD接口
?用于Gimbal Piston,CSP和Maxdamp的非接触式电动气浮高度控制隔振系统
?z轴位置重复性:10微米
?通过消除常规机械高度控制系统的杠杆接触点改善隔振性能

?气浮前馈功能使z轴对x - y轴运动的反应达到最小化

?可选“VX”功能集成惯性传感器,用于垂直隔离器共振主动阻尼

?比例电子阀。通过使用“开关”或传统电子阀门无脉冲噪声引入

Specifications-


Physical Dimensions

PEPS® II Controller 1.72" (43.7mm) H x 8.0" (203mm) W x 9.4" (240 mm) D

Weights

PEPS® II Controller: approximately 3.0 lb (1.2 kg)

Environmental
(refer to EN 61010-1: 1993,
EN 61010-1/A2: 1995)

For indoor use only, up to an elevation of 2,000 m (6560 ft.)
Maximum allowable temperature range: 5° C to 35° C
Maximum allowable humidity: 80% up to 31° C, decreasing linearly to 50% relative humidity at 40° C
Tolerance in main supply voltage: 85 VAC - 240 VAC
Over voltage category: 2
Pollution degree (IEC 664): 2
Ventilation requirements: 25 mm clearance on sides, 0 mm top and bottom

Power Requirements

Power input voltage range: 90-230 VAC
Input frequency range: 50-60 Hz

PEPS® II User Interface 
(Front Panel)

Power switch
4 menu buttons 
LCD display 20 x 2 characters 
2 diagnostic sockets (BNC-type) 
Three-color status LED 
USB port

PEPS® II Interface
(Rear Panel)

AC power entry with EMI filter
1 air INPUT snap-in port for 1/4" O.D. tubing 
1 air OUTPUT (Exhaust) snap-in port for 1/4" O.D. tubing 
4 air snap-in ports for 1/4" O.D. tubing (one per isolator) 
DB-25 male inputs-outputs and feedforward socket
1 Phoenix 0.2" pitch 6 pins GREEN header (vertical proximity sensors) 
1 Phoenix 3.5 mm pitch 6 pins BLACK header(horizontal proximity sensors) 
Grounding threaded stud (#10-32 thread) 
DB-25 F socket: 1x digital Input, 3x geophone sensorsinterface (“-VX” option) 
DB-25 F socket: 1x digital input, 3x current output proximity sensors (optional)

PEPS® II
Performance 
Specifications

Analog inputs (unipolar): 8 x 12 bit (16 bit using over sampling), 0…3.0 V full scale
Analog inputs (feedforward): 5 x 12 bit 
(16 bit using over sampling), ±9 V full scale
Analog inputs (unipolar) protection: +5 Volts, -0.5 V clipping
Analog input (feedforward) protection: ±15 Volts clipping
Analog outputs: 4 x 12 bit (16 bit with over sampling), 0…3.0 V full scale
Analog outputs (OPTIONAL): 8 x 16 bit, 0…3.0 V full scale
Analog output protection: indefinite short circuit protection, +5 Volts clipping
Digital input voltage rating: 0…+3.3 V, +5 V tolerant (+5 Volts clipping)
Digital output rating: 0…+3.3 V, 20 mA max.
Digital I/O protection: +5 Volts, -0.5 Volts clipping
External available power: +5 VDC, 2.0 A max; +15 VDC, 1.0 A max. (20 Watt max)
Communication port: USB, appears as RS-232 on PC
Processor: ARM7TDMI / 41.78 MHz
Control loop rate: 100 Hz - 2.0 KHz
Proximity sensors: 3x vertical, (3x horizontal optional) Eddy current, NAMUR 0-20 mA output
Velocity sensors - geophones (“-VX” option): 3x vertical, current output

Pneumatic 
Specifications

Long-term height stability: ±50 microns
Long-term tilt stability: ±50 micro radians
Servo valves: 4 x 2-way variable-orifice proportional servo valves
Valving technique: pure class-A 
Maximum input pressure: 120 PSI or 8.3 Bar or 830 KPa
Nominal air consumption: 60 slpm (2 scfm)
Air requirements: clean, dry air, filtered to 20 microns or better
Fail safe: isolators deflate on power failure or power off
Pneumatic fittings: 'one touch' quick fittings for 1/4" O.D. hose

Performance-




TMC 数字精密电子定位系统PEPS II信息由森泉光电有限公司为您提供,如您想了解更多关于TMC 数字精密电子定位系统PEPS II报价、型号、参数等信息,欢迎来电或留言咨询。

注:该产品未在中华人民共和国食品药品监督管理部门申请医疗器械注册和备案,不可用于临床诊断或治疗等相关用途

移动版: 资讯 Webinar 仪器谱

Copyright ©2007-2021 ANTPEDIA, All Rights Reserved

京ICP备07018254号 京公网安备1101085018 电信与信息服务业务经营许可证:京ICP证110310号