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TMC STACIS III主动隔振系统

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参考报价: 面议 型号: STACIS® III
品牌: TMC 产地: 美国
关注度: 6 信息完整度:
样本: 暂无样本 典型用户: 暂无
产地属性美洲价格范围1万-3万

STACISIII是最先进的主动振动隔离系统。采用先进的惯性振动传感器,复杂的控制算法,和最先进的压电致动器。STACIS通过连续测量地板活动、扩大和收缩压电致动器过滤地板振动来进行实时隔离振动。

最初被设计用于先进半导体工厂的精密显微光刻、计量和检测设备的隔振,STACIS现在是嘈杂环境中敏感仪器的行业标准解决方案,包括但不局限于半导体晶圆厂、失效分析实验室、纳米技术研究、纳米加工设备和材料研究。

STACIS III包括一个新型改进的数字控制器----DC - 2020。它的前后面板上有新型双核处理器,以太网和USB串口,这个新型先进控制系统为用户提供了一个现代的、易于使用的图形用户界面(GUI)。

拥有在世界各地的数百个成功安装案例,STACIS对于大部分振动敏感仪器来说都是最理想的振动消除系统。

Specifications-


Performance Specifications
Active degrees of freedom6
Active bandwidth0.6 Hz - 150 Hz
Passive natural frequency18 Hz vertical and horizontal
Effective active resonant frequency0.5 Hz
Isolation at 1 Hz40% - 70%
Isolation at ≥2 Hz≥90%
Settling time after a 10 lb (4.5 kg) step input (10:1 reduction)0.3 sec
Internal noise<0.1 nm RMS
Operating load range per isolatorLow capacity: 400-1100 lbs (181-499 kg)
Med capacity: 900-2100 lbs (408-953 kg)
Hi capacity: 1900-4500 lbs (862-2041 kg)
Static lift capacity per isolator9000 lbs (4090 kg)
Stiffness (1000 lb / 454 kg mass, Med capacity isolator)40,000 lb/in. (73 x 105 N/m)
Magnetic field emitted at maximum 4 in.(102 mm) from the isolator<0.02 μG broadband RMS
Isolator Design, Dimensions, and Environmental and Utility Requirements
Environmental and safetyCE and RoHS compliant
Active isolation elementshigh-force piezoelectric actuators that receive signal from a high-voltage amplifier with an output of up to 800 VDC
Passive isolation elementsingle stiff isotropic elastomer (no compressed air supply required)
Vibration sensor elementsdownward facing geophone type inertial sensors that measure floor vibration below the isolator and deliver voltage proportional to the velocity of vibration motion
Active feedback control loopFloor vibration is measured, processed and attenuated below the spring supporting the isolated surface
Isolator dimensions (WxDxH)11.75 x 12.5 x 10.8 in.
300 x 320 x 275 mm
Isolator weight75 lb (34 kg)
Operating temperature50° - 90° F
10° - 32° C
Storage temperature-40° - 130° F
-40° - 55° C
Humidity (operating)30 - 60%
System power requirements100, 120, 230, 240 VAC
50/60 Hz AC; <600 W
CE compliant
Floor displacement<480 μin. (12 μm) below 10 Hz
Isolator count per systemminimum of 3
Optionslaminated stainless steel platforms, frames, risers, leveling devices, earthquake restraints, lifthoods
DC-2020 Controller Specifications
Dimensions (WxDxH)19 x 8.5 x 1.75 in.
483 x 216 x 45 mm
Weight6.3 lb (2.9 kg)
Processor150/75 MHz dual core
Sampling rate10 kHz
Analog outputs16 channels
Analog inputs16 channels
Status lightsingle LED
Front panel ports1x serial USB 2.0
1x serial Micro-USB
1x Ethernet RJ-45
2x BNC
Rear panel ports1x serial USB 2.0
1x Ethernet RJ-45
1x RS-232 DB-9 legacy serial for legacy STACIS 2100 isolators
User interfaceFront panel LCD display
Character menu on HyperTerminal
Extended GUI for Microsoft Windows
Embedded Ethernet GUI

Performance-



4500 lbs (2045 kg) payload tested with simulated vibration at VC-C (500 μin./s, 12.5 μm/s RMS)

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注:该产品未在中华人民共和国食品药品监督管理部门申请医疗器械注册和备案,不可用于临床诊断或治疗等相关用途

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