丰富配件: | ||
多样品托盘: l 多样品夹具,样品尺寸(8“, 6“, 4“)向下兼容。 l 多基片夹具,zei多同时容纳9片基片。 | 温控热托盘: l 可加热样品托盘,zei高温度500℃,可实现热盘-热壁复合加热方式。
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尾气处理系统:
| 臭氧发生器:
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粉末旋转沉积罐模块: 配合热壁加热方式,进一步实现对微纳粉末样品全保型薄膜均匀沉积包覆。
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手套箱接口: 可从侧面或背面完美接入手套箱,与从底部接入手套箱不同,不占用手套箱空间。由于主机在手套箱侧面,反应过程中不对手套箱有加热效应,不影响手套箱内温度。
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应用案例
国内外用户
已发表文献
1、 Loïc Assaud et al. Systematic increase of electrocatalytic turnover over nanoporous Pt surfaces Prepared by atomic layer deposition. J. Mater. Chem. A (2015) DOI: 10.1039/c5ta00205b
2、 Xiangyi Luo et al. Pd nanoparticles on ZnO-passivated porous carbon by atomic layer deposition: an effective electrochemical catalyst for Li-O2 battery. Nanotechnology(2015) 26, 164003. DOI:10.1088/0957-4484/26/16/164003
3、 HengweiWang, et al. Precisely-controlled synthesis of Au@Pd core–shell bimetallic catalyst via atomic layer deposition for selective oxidation of benzyl alcohol. Journal of Catalysis (2015) 324, 59–68. DOI: 10.1016/j.jcat.2015.01.019
4、 Sean W. Smith, et al. Improved oxidation resistance of organic/inorganic composite atomic layer deposition coated cellulose nanocrystal aerogels. J. Vac. Sci. Technol. A (2014) 4, 32 DOI: 10.1116/1.4882239
5、 Fatemeh Sadat MinayeHashemi et al. A New Resist for Area Selective Atomic and Molecular Layer Deposition on Metal−Dielectric Patterns. J. Phys. Chem. C (2014), 118, 10957−10962. DOI: 10.1021/jp502669f
6、 Jeffrey B. Chou, et.al Enabling Ideal Selective Solar Absorption with 2D Metallic Dielectric Photonic Crystals. Adv. Mater. (2014), DOI: 10.1002/adma.201403302.
7、 Jin Xie, et al. Site-Selective Deposition of Twinned Platinum Nanoparticles on TiSi2 Nanonets by Atomic Layer Deposition and Their Oxygen Reduction Activities. ACS Nano (2013), 7, 6337–6345. DOI: 10.1021/nn402385f
8、 Pengcheng Dai, et al. Solar Hydrogen Generation by Silicon Nanowires Modified with Platinum Nanoparticle Catalysts by Atomic Layer Deposition. Angew. Chem. Int. Ed. (2013), 52, 1 –6. DOI: 10.1002/anie.201303813
9、 Joseph Larkin et al. Slow DNA Transport through Nanoporesin Hafnium Oxide Membranes. ACS Nano (2013), 11, 10121–10128. DOI: 10.1021/nn404326f
10、 Thomas M et al. Extended lifetime MCP-PMTs: Characterization and lifetime measurements of ALD coated microchannel plates, in a sealed photomultiplier tube Nuclear Instruments and Methods in Physics Research A (2013) 732, 388–391. DOI: 10.1016/j.nima.2013.07.023
11、 Kevin J. Maloney et al. Microlattices as architected thin films: Analysis of mechanical properties and high strain elastic recovery. APL Mater. 1, 022106 (2013) DOI: 10.1063/1.4818168
12、 Sean W. Smith et al. Improved Temperature Stability of Atomic Layer Deposition Coated Cellulose Nanocrystal Aerogels. Mater. Res. Soc. Symp. Proc. (2012) DOI: 10.1557/opl.2012.
GEMStar XT 产品型号: GEMStar -4 XT: l zei大4英寸/100 mm基片沉积 l 单路前驱体输运支管, 4路前驱体瓶接口 l 不可升级为等离子体增强ALD GEMStar -6/8 XT: l zei大6英寸(150mm)/8英寸(200mm)基片沉积 l 双路前驱体输运支管, 8路前驱体瓶和CF-40接口 l 可升级为等离子体增强ALD | |
| GEMStar -8 XT-P: l zei大8英寸/200mm基片沉积 l 双路前驱体输运支管, 8路前驱体瓶和CF-40接口 l 装备高性能ICP等离子发生器 13.56 MHz 的等离子源非常紧凑,只需风冷,zei高运行功率达300W。 l 标配3组气流质量控制计(MFC)控制的等离子气源线,和一条MFC控制的运载气体线,使难以沉积的氧化物、氮化物、金属也可以实现均匀沉积。 |
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