2850412321
| Resolution: | Standard mode: 0.9 nm at 15 keV 1.7 nm at 1 keV 2.0 nm at 500 eV Low Vacuum mode: BSE: 2.0 nm at 30 keV LVSTD: 1.5 nm at 30 keV | Beam Deceleration mode (option): 1.4 nm at 1 keV 1.6 nm at 200 eV STEM mode (option): 0.9 nm at 30 keV |
| Maximum Field of View: | 7.0 mm at WD Analytical 6 mm 21.0 mm at WD 30 mm | |
| Electron Beam Energy: | 200 eV to 30 keV / down to 50 eV with the BDT | |
| Probe Current: | 2 pA to 400 nA |
| Ion Gun: | Xe ion Plasma FIB |
| Ion Beam Energy: | 3 keV to 30 keV |
| Probe Current: | 1 pA to 2 µA / 1 pA to 1 µA |
| Resolution: | < 25 nm at 30 keV / < 15 nm at 30 keV (at SEM-FIB coincidence point) |
| Magnifcation: | Minimum 150 × at coincidence point and 30 keV (corresponding to 1 mm feld of view), maximum 1,000,000 × |
| SEM-FIB Coincidence at: | WD 6 mm for SEM - WD 12 mm for FIB |
| SEM-FIB Angle: | 55° |
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