技术指标:
Mass Resolution for low mass ion > 11.500M / ΔM for Si (28SiH+)
Mass Resolution for insulator > 10,000M / ΔM for PET (m/z 104amu)
Options C60 gun, cesium gun, oxygen gas gun, Hot/Cold stage, Transfer Vessel, 300mm stage, etc.
Standard Features
TRIFT质量分析器
30 kV LMIG with Bi, Au, or Ga emitter
Dual beam charge neutralization 双离子束电荷中性化
5 axis sample stage 5 轴样品台
In-situ optical viewing
Secondary electron detector
WinCadence instrument control and data reduction software package
Analysis chamber with four primary ion gun ports
350 L/秒抽速分子涡轮泵
Integrated bakeout facilities
可选附件
20 kV C60 pulsed ion gun
20 kV Ar2500+ gas cluster ion gun
2 kV Cs ion gun
5 kV gas gun (Ar/O2)
Oxygen flood module
30 kV Ga FIB gun
Hot/Cold sample stage module
Flash cooling for sample intro chamber
High temperature sample stage module
Sample transfer vessel
Intro chamber glove box
Voltage cycling sample stage module
Sample preparation chamber
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