KLA-Tencor探针式台阶仪

KLA-Tencor先进的探针式台阶仪，可精确测量纳米级至2毫米台阶高度，并可分析薄膜表面粗糙度、波纹度、应力，集高测量精度、多功能性和经济性于一体，是生产线及材料分析等应用领域的理想选择。因其具有6.0A (1σ)或0.1%台阶高度重复性以及亚埃级的分辨率,是目前商业化仪器里（经市场验证）最高精度的台阶仪产品。

D系列台阶仪：Alpha-Step D-600 Stylus Profiler

   KLA-Tencor  AlphaStep轮廓仪配置自动台，采用了新型光学反射探测系统来测量高度，同时应用电磁力控制探针压力，能有效的实现超微力和低惯量 。这些创新型使表面轮廓仪能够无伤测量软薄膜样品。

The Alpha-Step? D-600 offers high resolution 2D & 3D pro?ling, 2D stress, pro?le stitching, and many more features in an easy-to-use platform with the best price-to-performance available in the market. The D-600 system includes an innovative optical lever sensor technology that provides the highest vertical range at 1200 μm, sub-Angstrom resolution plus low force, 0.03 to 15 mg. The ability to measure a wide range of applications, from nanometer to millimeter steps, high resolution roughness, soft materials, and thin ?lm stress enables the D-600 to serve various industries in research and development and production environments.

The D-600 includes a 200 mm motorized stage, with 150 x 178 mm X-Y range of motion. The new sequencing software features manual deskew alignment and programming up to 1000 locations on a sample. The system features advanced optics, a high resolution 5 MP camera with a 4x digital zoom and enhanced video controls for highly versatile sample visualization.

Applications

The D-600 is capable of addressing a wide range of measurements and applications:

?  Precision step height

?  Surface form, bow

?  Surface texture

?  Material  acterizations

?  Thin ?lm stress

?  3D scanning

PRODUCT FEATURES

The D-600 stylus pro?lers provide a wide range of application speci?c capabilities, meeting the needs of the research, engineering, and production communities.

Stylus Pro?ling

The 200 mm sample stage supports scan lengths up to 55 mm in a single scan and up to 200 mm utilizing the stitching function. The D-600 provides the highest vertical range at 1200 μm and low force sensor technology at 0.03 mg, ensuring scan precision on an array of applications, including thin ?lms, soft materials, tall steps,

bow, and stress.

High Resolution Camera

The D-600 features advanced optics that includes a high resolution 5 MP color camera with 4x digital zoom and enhanced lighting controls.

Keystone Correction New keystone correction software automatically removes video view sample distortion due to the angled optics. Arc Correction New arc correction software removes arc motion error during scanning, improving accuracy for sidewall angles and step width measurements. 3D Scanning & 2D Stress (optional) 3D scanning produces photo-realistic surfaces, enabling detailed surface topography analysis of step height, texture, and sample form. 2D stress utilizes Stoney’s Equation and changes in sample bow, before and after processing,to calculate thin ?lm stress. Step Height Repeatability A sub-Angstrom resolution, optical lever sensor translates into the most repeatable low mass, low noise sensor design. This enables step height repeatability of 5 ? on a 1 μm step for demanding process needs. Intuitive User Interface New, simpli?ed recipe creation enables quick setup of 3D scans, sequencing for multiple site measurements, sequence alignment reference points, and automated stitching for ?lm stress.
Recipe and system hardware controls are shown in the same display for quick sample positioning and measurement.Raw data is saved, enabling data re-analysis without the need for new measurements.