【技术特点】-- SD-160离子溅射仪

SD-160型离子溅射仪是采用二级（DC）直流溅射原理设计而成的离子溅射镀膜设备。二极（DC）直流溅射是一种最简单、可靠、经济的镀膜技术，是许多厂商提供的离子溅射仪的基础。除了具有通常的基本结构外，它的特点是：配置有样品溅室，真空显示表、溅射电流指示表、溅射电流调整控制器、微型真空阀、定时器。工作时结合内部自动控制电路很容易控制真空室压强、电离电流及选择所需的电离气体，获得最佳镀膜效果。 特殊设计的钟罩边缘橡胶密封圈，可保证长期使用不会出现影响样品溅射室真空度的玻璃钟罩“崩边”现象；陶瓷密封高压头比通常采用的橡胶密封更经久耐用。根据电场中气体电离特性，采用大容量样品溅射真空室和相应面积溅射靶，使溅射镀层更均匀洁净。此外SD-160应用高稳定性、高灵敏  度电磁阀，采用双气路自动控制系统，更  易实现对样品的保护以及对样品成膜品质  的保证。特别适用于电镜实验室的SEM样品制备和新材料研究的电极制作。

      配有高位定性的飞跃真空泵

“The SD-160 type ion sputtering apparatus is designed by means of the two stage (DC) DC sputtering principle. DC (DC) sputtering is the simplest, reliable and economical coating technology, and is the foundation of many manufacturers.

In addition to its usual basic structure, SD-160 is characterized by the configuration of a sample splash, a vacuum display table, a sputtering current indicator, a sputtering current adjustment controller, a miniature vacuum valve, and a timer. It is easy to control the vacuum chamber pressure, ionization current and choose the required ionization gas when working in conjunction with the internal automatic control circuit, so as to achieve the best coating effect. Specially designed bell ring rubber seal ring,

It is guaranteed that the long term use of glass clocks, which will not affect the vacuum of the sample sputter room, is “disintegrating“; the ceramic sealing high pressure head is more durable than the usual rubber seal. According to the ionization characteristics of the gas in the electric field, the large volume sample sputtering chamber and the corresponding area sputtering target are used to make the sputtering coating more uniform and clean.

In addition, SD-160 uses high stability, high sensitivity solenoid valve and dual gas automatic control system. It is easier to protect the sample and guarantee the quality of film forming. It is especially suitable for SEM sample preparation in electron microscope laboratory and electrode preparation for new material research.

High qualitative jump vacuum pump“

【技术特点对用户带来的好处】-- SD-160离子溅射仪

【典型应用举例】-- SD-160离子溅射仪