Lyncee Tec MEMS全息测振分析仪

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Lyncee Tec气相色谱仪GC, 全息MEMS测振分析仪记录MEMS振动周期中的三维形貌时序图，为MEMS振动测量提供了的丰富数据，特别是可以在被测视场......

参数指标

Features	DHM®	3D LDV	LDV
Dynamic topography	√	×	×
3D vibrations (X,Y,Z)	XYZ	XYZ	Z only
Maximum frequency	25 MHz	25 MHz	up to 1.2 GHz
Full field measurement	√	with XY scanning	with XY scanning
Diffraction limited resolution	√	limited by laser spot size	limited by laser spot size
Objective turret	√	×	×
No need of sample preparation	√	–	×
Measurement of complex structures	√	×	×
Measurement of complex motions (simultaneous in-, out- of plane, tilt, … )	++	–	–
Measurement of in-plane displacement lager than MEMS structures	√	×	×