DIN 50452-1:1995
半导体工艺用材料的检验.液体中粒子分析的试验方法.第1部分:粒子的显微镜测定
Testing of materials for semiconductor technology - Test method for particle analysis in liquids - Part 1: Microscopic determination of particles
- 标准号
- DIN 50452-1:1995
- 发布
- 1995年
- 发布单位
- 德国标准化学会
- 当前最新
- DIN 50452-1:1995
- 被代替标准
- DIN 50452-1:1988
- 适用范围
- This method cover the determination of the concentration of particulate matter contamination from liquids isolated on a membrane filter by microscopic counting. The scope is limited to sizing particles of 5 ?and more.