BS ISO 17973-2003
表面化学分析.中分辨率螺旋电子光谱仪.元素分析用能量标度的校准

Surface chemical analysis - Medium-resolution Auger electron spectrometers - Calibration of energy scales for elemental analysis


 

 

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标准号
BS ISO 17973-2003
发布日期
2003年02月13日
实施日期
2003年02月13日
废止日期
中国标准分类号
G04
国际标准分类号
71.040.40
发布单位
GB-BSI
代替标准
BS ISO 17973-2016
被代替标准
00/122653 DC-2000
适用范围
This International Standard specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical use in identifying elements at surfaces. In addition, it specifies a method for establishing a calibration schedule. It is applicable to instruments used in either direct or differential mode, where the resolution is less than or equal to 0,5 % and the modulation amplitude for the differential mode, if used, is 2 eV peak-to-peak. It is applicable to those spectrometers equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4 keV or higher beam energy.

BS ISO 17973-2003 中可能用到的仪器设备





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