DIN 50451-6:2014 半导体工艺用材料测试. 液体中痕量元素测定. 第6部分: 测定含有氢氟酸的高纯度氟化铵溶液蚀刻混合物和高纯度氟化铵溶液 (NH4F) 中的36种元素
Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 6: Determination of 36 elements in a high-purity ammonium fluoride solution (NH4F) and in etching mixtures of high-purity ammonium fluoride solution