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1   Scope This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well

Ellipsometry. Principles

Ellipsométrie - Principes

Ellipsometry - Principles (ISO 23131:2021); German version EN ISO 23131:2022

Calibration Specification for Ellipsometers

BS ISO 23131. Ellipsometry. Principles

Ellipsometry - Principles (ISO 23131:2021)

Ellipsometry - Principles (ISO 23131:2021)

Ellipsometry - Part 1: Principles

Ellipsometry - Part 3: Transparent single layer model; Text in German and English

Ellipsometry - Part 2: Bulk material model; Text in German and English

Ellipsometry - Part 6: Effective Materials model; Text in German and English / Note: Date of issue 2023-01-27

Ellipsometry - Part 4: Semi-transparent single layer model; Text in German and English

Ellipsometry - Part 5: Multiple layers and periodic layers model; Text in German and English / Note: Date of issue 2023-01-27




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