扫描电镜环境解决方案

SEM-Base® VI is the next generation in STACIS active piezoelectric vibrationcancellation. SEM-Base VI is designed to support all commercial Scanning ElectronMicroscopes (SEMs), as well as many Focused Ion Beam (FIB) and Small Dual Beaminstruments. SEM-Base VI provides improved vibration isolation performance, afaster more robust controller, and an advanced graphical user interface (GUI). SEMBase VI will enable more labs and facilities to achieve the level of floor vibrationrequired to satisfy the specifcations of the tool manufacturer.SEM-Base VI uses a unique “serial architecture” in which the vibration sensorsmeasure floor vibration, not payload vibration. This ensures that, unlike otherdesigns, payload resonances do not inherently limit vibration isolation or causeinstability. The vibration sensors are low frequency inertial velocity sensors formaximum sensitivity in the diffcult to measure sub-hertz range. Combined with ourunique piezo-actuator technology, SEM-Base VI achieves extremely high levels ofvibration cancellation, even on already quiet floors.SEM-Base VI provides, on average, 6 dB more vibration isolation than previousmodels. In addition, TMC’s next generation controller, the DC-2020, features a newdual-core processor and provides tool owners and researchers with a very simpleand easy-to-use graphical interface for fast system assessment and operationalpeace-of-mind. When connecting over Ethernet, the DC-2020 creates the SEMBase GUI in the user’s browser with no additional software or application program toinstall. Alternatively, the user can interface with the controller via an on-board menudriven liquid crystal display (LCD).