Abstract –Ionizer fans are used to eliminate static electricity in
clean room. After a period of use, the white unknown deposits are found
on fan cover. Several analytical technologies are employed to identify
the ingredient of the deposits. The cause of deposit’s formation is
also discussed in this paper. Keywords: EDX, Raman, IC, Ammonium Oxalate
I. Introduction Ionizer
fans are used to eliminate the static electricity and purify the air in
clean room. After a period of use, the white unknown deposits are found
on the ionizer fan cover. This kind of deposits will form. on fan cover
again after it’s cleaned with IPA in one month. We employ several
analytical technologies to identify the ingredient of the deposit. Also
we explain the cause of formation of the deposit.
