400-6699-117转1000
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工商注册信息已核实!参考报价: | 面议 | 型号: | D-180、D-125 |
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400-6699-117转1000
Recently Refurbished
New Software, Control Hardware,
Dry Process Pump, Dry Loadlock
Pump and Heater Assembly.
Wafer capacity: Three two inch wafers.
Load lock: Loadlock chamber with hepa filter loading area.
Heater: Single zone graphite heater
Temperature control: Temperature monitor single point T/C, Eurotherm controller, single point
Sekidenko Pyrometer.
Group III MO sources: TMGa - 2 units; TMIn - 2 units; TMAl -2 units
Group V hydride sources: AsH3 -2 lines; PH3 -2 line.
Dopants MO: CP2Mg -1 unit, DeZn - 1 unit
Dopants Hydride: H2/SiH4 - 2 lines
Neslab bath: 6 units.
Piezocon: Single channel concentration monitor for TMIn expandable to Four channels (option).
Pump: EBARA A30;
Exhaust system: particle filter/ housing; Phosphorus trap; P-trap automatic regeneration system
(option).
Gas Monitoring: CM4 4 point toxic gasmonitor.(integration option)
Software: Windows based control software.
翻新MOCVD信息由美国SVTA公司中国办事处为您提供,如您想了解更多关于翻新MOCVD报价、型号、参数等信息,欢迎来电或留言咨询。
注:该产品未在中华人民共和国食品药品监督管理部门申请医疗器械注册和备案,不可用于临床诊断或治疗等相关用途