400-6699-117转1000
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工商注册信息已核实!参考报价: | 面议 | 型号: | Lyncee Tec 4D |
品牌: | Lyncee Tec | 产地: | 瑞士 |
关注度: | 19 | 信息完整度: | |
样本: | 典型用户: | 暂无 | |
供应商性质 | 一般经销商 | 产地类别 | 进口 |
400-6699-117转1000
Transparent pattern characterization by DHM® is a unique solution to measure 3D topography and thicknesses of transparent structures on a reflective substrate.
Measurement of surface structures from 10 nanometers to several microns
Measurement of refractive indices
Characterization of deposited or etched structures composed of up to 3 layers
Non-contact method, ideal to measure liquids and soft materials
The 3D topography as well as the thicknesses and refractive indices of patterned transparent samples are retrieved by a dedicated post-analysis software by computing the complete reflected wavefront based on the laws of physics. Therefore DHM® provides a solution to measure the correct topography while measurements with alternative optical profilometer are affected by the multiple reflections of the light signal occurring in transparent materials.
Structures of Transparent materials such SiO2 and thin metal layers, widely used in coating, isolating, protective or structuring layers in semiconductor and MEMS industries, are typical samples easily characterized by DHM®.
Dynamical topography of liquids on microfluidics devices and on functional surfaces is critical to characterize because of multiple interferences occurring between the liquid and the substrate. DHM® with the Reflectometry analysis software enables to provide accurate dynamical measurements.
This solution encompasses a holographic microscope instrument by Lyncée Tec with a full range of microscope objectives, the dedicated Koala acquisition and analysis software and the dedicated Reflectometry post-analysis software.
DHM® technology and its dedicated Reflectometry post-analysis software offer significant benefits.
Perform Reflectometry analysis with a single DHM® instrument
Measure the topography on coated materials with metrological precision
Study surface topography of semiconductors with photoresist
Study dynamical dielectric constant variation (Hall effect)
Measure the 3D topography of liquids and soft materials
Combien DHM® Reflectometry analysis software with live profilometry, stroboscopic synchronization and industrial solutions
In 2009, on request of a DHM® user measuring SIMS, Lyncée Tec has developed the solution to interpret optical measurement of samples with transparent structures. Since then, the Reflectometry analysis software has been continuously improved with new features and tools. Among many samples, Lyncée Tec has published the comparative measurements of geometrical topography for the following sample configurations:
Height measurement of transparent multi-layered steps
Non-contact and complete 3D topography without any scanning
Step edges precisely highlighted
Depth measurement of a crater dug through transparent multi-layers on reflective substrate
Complete 3D topography of relatively large crater area
Depth determination with subnanometric vertical resolution
Topography measurement of Liquid (TetraEthylenGlycol, TEG) drop on Si substrate
Non-contact, i.e. non damaging measure
Unique solution for complete 3D characterization of liquid or soft material drop
“Digital Holographic Reflectometry for Semi-Transparent Multilayers Measurement“, T. Colomb & al.
“Réfléctométrie Holographique Numérique Appliquée à la Métrologie des Fluides“, T. Colomb & al.
“Digital Holographic Reflectometry“, T. Colomb & al.
Lyncee Tec 4D反射测量仪信息由上海巨纳科技有限公司为您提供,如您想了解更多关于Lyncee Tec 4D反射测量仪报价、型号、参数等信息,欢迎来电或留言咨询。
注:该产品未在中华人民共和国食品药品监督管理部门申请医疗器械注册和备案,不可用于临床诊断或治疗等相关用途