MFP-3D Origin原子力显微镜

High-precision, low-noise scan motion, and closed-loop operation in all three axes

X & Y Range 90 µm

X & Y Sensors<0.5 nm noise, <0.5% non-linearity (max deviation/full travel)

Z Range >15 µm (Extended range Z option >40 µm)

Z Sensor<0.25 nm noise, <0.05% non-linearity (max deviation/full travel)

Lowest-noise force measurements limited only by inherent thermal noise limit

Cantilever Deflection Sensing Optical lever in an inverted configuration (incident beam off-vertical) to dramatically reduce

interference from light reflected by the sample.

Light Source Low-coherence infrared (860 nm) superluminescent diode (SLD), FDA/IEC Class 1M (non-hazardous).

DC Detector Noise<15 pm

Low system noise enables high-resolution imaging

DC Height Noise<50 pm

AC Height Noise<50 pm

Versatile system configuration

Sample Stage Accommodates samples up to 80 mm diameter and up to 10 mm thick (up to 27 mm with optional leg

extenders). Micrometer driven stage allows precise tip-sample alignment.

Top-View Optics Probe, IR SLD spot, and sample can be viewed through top-down brightfield optics with two selectable

fields of view, 720 µm and 240 µm, through a 10X objective.

Available Upgrades Can be upgraded to full MFP-3D and MFP-3D-BIO™ configurations with all MFP-3D accessories.

MFP-3D Origin Controller – 100% digital controller for fastest, lowest-noise performance

Scanner Drive Three high-resolution 24-bit DACs are used for XY scanning and Z motion, ensuring that bit noise

(<6 pm XY and <1 pm Z) never limits scan resolution. Ultra-low-noise amplifiers result in <70 µV Adev noise on the high voltage

(-10 to 150 V) piezo drive signals in a 1 Hz to 10 kHz bandwidth.

Closed-loop Scanner Feedback Integrated low-noise position sensors in all three axes are immediately digitized and input

to three independent, all-digital feedback loops to provide seamless closed-loop operation. This eliminates and corrects position

errors in the scanning system due to piezo hysteresis, creep, and non-linearity, and substantially reduces thermal drift.

Deflection Signal Immediately sampled with 16-bit ADC operating at 5 MHz with seven gains and a 16-bit offset.

AC Mode Support Two Direct Digital Synthesizers (DDS) are summed to generate the AC drive signal on a 16-bit, 10 MHz

DAC at frequencies from DC to 2.0 MHz. Fully digital dual lock-in provides quadrature outputs at bandwidths up to 9 kHz.

Digital Q-control can typically enhance or suppress cantilever Q by up to 5X.

Data Acquisition Limited only by the memory on the PC (i.e., 10 million point force curves, >8k x 8k pixel images).

Computer Interface Universal Serial Bus (USB) interface to a high-performance, dual-monitor, Windows 7 64-bit PC.

(All noise measurements are quoted as the average deviation measured with a 1 kHz bandwidth over a full 10 second period unless otherwise

noted. Specifications assume recommended vibration and acoustic isolation in an appropriate laboratory environment.)

参考：

　显微镜：第三代平板式、全闭环先进扫描技术平台

　　1.扫描器：横向(X-Y)范围90&micro;m×90&micro;m;竖直(Z)范围15&micro;m (标配型)或者40&micro;m(选配型)

　　2. 噪声：垂直(Z)方向上的RMS值<0.3埃 (平均偏差 (Adev) 在0.1Hz-1kHz 带宽)

　　3. 样品大小：直径≤100mm, 厚度≤20mm

　　4.控制器:全数字化、模块化、可编程控制器，其数据处理能力仅仅受限于计算机的的内存大小(允许连续一千万点力曲线和>8190 x 8190点高密度像素成像)。允许在5MHz的速度下连续获得200万以上的数据。

　　5. MFP-3D可以实现全面的SPM表面表征技术，包括：

　　•轻敲模式(Tapping Mode AFM)-拥有Q-control控制技术

　　•接触模式(Contact Mode AFM)

　　•定量相位成像模式(Phase Imaging)

　　•横向力模式(laterial Force Microscopy, LFM)

　　•磁场力显微技术(Magnetic Force Microscopy, MFM)

　　•扫描隧道显微技术(Scanning Tunneling Microscopy, STM)

　　• 力调制(Force Modulation)

　　• 静电力显微技术(Electric Force Microscopy, EFM)

　　• 表面电势显微术(Surface Potential Microscopy)

　　• 动态和静态力曲线测试(Force-Distance)

　　•力阵列测量(Force Volume Measurement)

　　• 纳米压痕/划痕(Nanoindenting/Scratching)

　　• 超高分辨率导电显微技术(ORCA)

　　• 压电响应模式(Piezo Respnance mode, PR mode)

　　独有zl技术

　　•高次谐波成像模式(dual AC)

　　• 分子力力谱模式(Molecule Force Spectroscopy)

　　• 高压压电力模式(HV-PFM)

　　• 能带激励显微技术(Band-excition)

　　•双频共振追踪压电模式(Dual frequency resonance tracking)

　　•洛伦茨力驱动轻敲模式(i-DriverTM)