DIN 50450-1-1987 半导体工艺材料的检验.载运气体和添加剂气体中杂质的测定.用五氧化二磷电池测定氢、氧、氮、氩和氦中的水杂质
Testing of materials for semiconductor technology; determination of impurities in carrier gases and doping gases; determination of water impurity in hydrogen, oxygen, nitrogen, argon and helium by using a diphosphorus pentoxide cell
The standard determines a test method for the determination of water impurity in carrier gases and doping gases (H<(Index)>2, O2, N2, Ar, He) used in the semi conductor technology.