This part of ISO 6145 specifies a dynamic method using permeation membranes for the preparation of calibration gas mixtures containing component mole fractions ranging from 10-9 and 10-6. A relative expanded uncertainty of 2,5 % of the component mole fraction can be achieved using this method. In the mole fraction range considered, it is difficult to maintain some gas mixtures, for example in cylinders, in a stable state. It is therefore desirable to prepare the calibration gas immediately before use, and to transfer it by the shortest possible path to the place where it is to be used. This technique has been successfully applied in generating low content c