方案详情

This paper reports the first single-chip scanning probe microscope (sc-SPM) that is capable of simultaneously performing atomic force microscopy (AFM) and scanning thermal microscopy (SThM) without requiring any offchip scanning or sensing components.  A thermalpiezoresistive resonant sensor is used to hold the tipsample interaction force constant, while a bolometer-style probe measures local heat transfer effects. The reported instrument obtains local thermal measurements of powered electrothermal MEMS devices and also achieves the first patterning results with a single-chip scanning probe instrument. Importantly, subsurface features on a 22nm CMOS chip are revealed by thermal phase imaging with the present device.