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首页 > 产品展示 >  > 镀碳仪、喷金仪、离子溅射镀膜仪

镀碳仪、喷金仪、离子溅射镀膜仪

参考报价: 面议 型号: EMS 150T
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型号:EMS150T  S
简介:
分子涡轮高真空系统,CPU程序全自动控制,触膜屏用户界面,可镀多种膜材,也可镀相对较厚的膜。具有快速溅射易氧化和不氧化金属(贵金属)靶材的功能,可选各种溅射靶材,包括常用于场发射电镜的铱和铬。

 

可选配一系列可选附件,如:金属蒸镀、碳丝蒸镀、膜厚测量等。
标准配置的样品台,无倾角,高度不可调。如果需要倾斜样平台,需要另外选择。
 
  • 主要技术指标:
    尺寸和重量:仪器机箱:585mm宽x 470mm长 x 410mm高 (总高: 650mm)
  • 仪器总重量:33.4Kg
  • 工作腔室:硼硅酸盐玻璃,152mm(内) x 127mm高
  • 触摸屏全图像用户界面
  • 样品台:标配件(无倾角,高度不可调) ,转速8-20rpm
  • 真空系统:
              涡轮分子泵:带有空气冷却的涡轮分子泵(标准配置里面)
              旋转机械泵:双级旋转机械泵(需要另购)
  • 真空度: 5x10-3-----5x10-1 mbar  
  • 溅射时间:zei长60分钟
  • 溅射靶材:57mm Ø x 0.3mm Chromium(标准配置:铬靶材一个)
产品选购

货号
产品名称
规格
3380
EMS150T S - High resolution turbomolecular pumped sputter coater, including a  54mm Ø x 0.3mm chromium target
标准配置
91003
Edwards RV3 50L/s two-stage rotary pump, with vacuum hose, coupling kit and oil mist filter

 
其它附件的选购:
 

货号
产品名称
规格
3200
Sputtering head insert suitable for oxidizing and non-oxidizing metals. Supplied with a 54mm x 0.3mm thick chromium target as standard. For additional targets see Sputtering Targets section
3210
Additional sputter insert for quick metal change. Note: this is an entire sputtering assembly.
3270
Extended height vacuum chamber (214mm high – the standard chamber is 127mm high). For increased source to sample distance and for coating large specimens
3280
Vacuum spigot allows more convenient connection of the vacuum hose to the rear of the EMS150T when bench depth is limited
3290
Film thickness monitor (FTM) attachment. Consists of a built in chamber mounted quartz crystal oscillator (includes crystal). As sputtered or evaporated material is deposited onto the crystal, so its frequency of oscillation is modified. This ‘modification’ is used to measure and control the thickness of material deposited
3300
Spare quartz crystals. Pack of three
3320
Full range vacuum gauge for low and high vacuum measurement (a low vacuum Pirani gauge is fitted as standard)
4513
Glow discharge insert to modify surface properties (eg hydrophobic to hydrophilic conversion) or to clean surface residues (TS and T ES only). Can be retrofitted
3340
Rotate-tilt specimen stage with adjustable tilt (up to 90 degrees) and height (37mm-60mm). Tilt angle can be pre-set. 50mm Ø specimen platform with six stub positions for 15mm or 6.5mm or 1/8" pin stubs. Stage rotation speed variable between 8 and 20rpm
3350
Variable angle “Rotacota” rotary planetary stage with 50mm Ø specimen platform. Has six stub positions for 15mm or 6.5mm or 1/8" pin stubs. Stage rotation speed variable between 8 and 20rpm
3360
Flat rotation specimen stage for 100mm / 4” wafers, includes gearbox for increased coverage. Stage rotation speed variable between 8 and 20rpm
3370
variable between 8 and 20rpm. Includes gear box to allow optional FTM to be used

 
靶材的选购(举例如下,实际提供的靶材规格材质更多):

货号
产品名称
规格
3410
57mm Ø x 0.1mm,金靶
3411
57mm Ø x 0.1mm金/钯靶(80/20)
3412
57mm Ø x 0.1mm铂金靶
3413
57mm Ø x 0.1mm镍靶
3414
57mm Ø x 0.1mm银靶
3415
57mm Ø x 0.1mm钯靶
3416
57mm Ø x 0.1mm铜靶
3417
57mm Ø x 0.3mm铬靶
3418
57mm Ø x 0.5mm钨靶
3422
57mm Ø x 0.1mm铝靶

镀碳仪、喷金仪、离子溅射镀膜仪信息由海德创业(北京)生物科技有限公司为您提供,如您想了解更多关于镀碳仪、喷金仪、离子溅射镀膜仪报价、型号、参数等信息,欢迎来电或留言咨询。

注:该产品未在中华人民共和国食品药品监督管理部门申请医疗器械注册和备案,不可用于临床诊断或治疗等相关用途

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