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使用MM-16椭圆偏振光谱仪表征AIN的光学特性
发布时间：
2016-09-22 10:13
来源：
HORIBA科学仪器事业部
| 领域： | 电子/电器/半导体 | ||
| 样品： | AIN | 项目： | 光学特性 |
| 方案文件名 | 下载 |
|---|---|
使用MM-16椭圆偏振光谱仪表征AIN的光学特性 |
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The feasibility of using the MM-16 SE in measuring thickness and refractive index of AlN thin and thick films has been demonstrated. Non destructive measurement of thickness was successfully applied to films as thick as 3µm deposited on Si. The multi-layer models with a surface layer with void and the simple dispersion gave useful information about surface roughness, film density and oxygen contamination.
