ContourGT-X-Datasheet-英文彩页

　　ContourGT-X 3D Optical Microscope

　　Automated, Gage-Capable Metrology for R&D and Production

　　The fully automated, large-sample ContourGT-X 3D Optical Microscope combines unmatched measurement capabilities with highest vertical resolution over the industry’s largest field of view. Designed from the ground up for the most demanding R&D, quality assurance, and process quality control needs, this flagship of the ContourGT® product line offers the ultimate gage-capable 3D optical microscopy solution. Only the ContourGT-X incorporates Bruker’s patented tip/tilt head a patented self-calibrating laser reference, integrated pattern recognition, and a host of other proprietary interferometry innovations. No other metrology system provides the non-contact accuracy, throughput, and operator convenience for such a vast range of production metrology and imaging applications.

Benchmark for Accuracy and Robustness

• Unique metrology sensor design with patented dual-LED light source
• „„Self-calibrating, metrology optimizing laser reference
• „„Integral vibration-isolation floor-mount cabinet

Fastest, Easiest Nanometer-Scale Measurements

• „„ Fully automated measurement capabilities (focus, intensity, tip/tilt head, staging, FOV)
• „„ Nanometer-scale resolution on high-contour surfaces

Most Powerful Measurement and Analysis

• „„ Streamlined, customizable production interface
• „„ Real-time automated measurement optimization
• „„ Extensive library of filters and customizable analysis options

　　Robust, Production Gage

　　In addition to the unmatched measurement and imaging capabilities of Bruker-exclusive interferometry technology, the ContourGT-X is equipped with a proprietary internal laser reference and customdesigned industrial cabinet for maximum stability and robustness. The system’s automation-ready configuration includes everything necessary for rapid optimization for almost any production environment, from an air table stabilizer kit for enhanced X, Y, Z wafer placement accuracy to optimization of PDU, EMO and vacuum systems for integration and modified vacuum chucks for autoloader end-effector compatibility.

　　Streamlined Operator Interface

　　The ContourGT-X features the industry’s most functional and streamlined graphical user interface for production operators, providing tools to customize process workflow, automate mapping, and load measurement recipes. enabling rapid in-line analysis capabilities and manufacturing reliability. Vision64® software provides intuitive access to an extensive library of preprogrammed filters and analyses for LED, solar cell, thick films, semiconductor, ophthalmic, medical device, precision machining, MEMS, and tribology applications.