2850412321
规格参数
| 尺寸 | 420 mm X 540 mm X 535mm (16.5” X 21.3” X 21.1”) (W,H,L) – with Optics |
| 重量 | 32 kg (70 lbs.) |
| 基座 | Solid Aluminum rigidbase on rubber vibration isolation feet |
| 卡盘平台X-Y 移动 | Adjustable magneticslide for coarse adjustment (> 150 mm) Fine micrometeradjustment – 25 mm (X, Y) Entire stage easilyremoved via magnetic base |
| 卡盘平台Z 移动 | Z travel: 20 mm(0.78”) with micrometer driven contact/separation |
| Theta 移动 | Travel: 360 degrees(coarse) and 10 degrees (fine) with theta locking knob |
| 卡盘 | Vacuum or mechanicalclamping, round or square, HF, ambient, thermal and custom Handle die, wafflepacks, sawn wafers on frame, broken wafers and wafers up to 150 mm Nickel plated steelwith concentric vacuum rings (standard), other materials available |
| 台板 | Aluminum withstainless steel top and removable front wedge for easy wafer handling Manipulator fixation– magnetic (standard), vacuum (with optional vacuum manifolds) |
| 台板移动 | Micrometer drivenplaten Z adjustment |
| 显微镜安装 | Rigid aluminum post(standard) or boom available |
| 显微镜移动 | Manual coaxial andlinear fine microscope movement - 50 mm (X) and 75 mm (Y) (2”x3”) |
| 光学组件 | Trinocular stereozoom microscope (standard), compound or zoom tube (optional) |
| 其它工具 | Power: AC 110/220V AC50-60 Hz 20A Vacuum: 23 Hg or -0.8bar |
| 可选配件 | CCTV Systems (camera,monitor and adapter) and stand (shown in picture page 1) Manipulators, ProbeArms, Probes, Cables – Coaxial, Triaxial, Kelvin, HF, Optical Probe Card andPackage Part Holders Vibration IsolationTables, Dark Box Stages – wafer,packaged part, thermal |
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