Prof.Mikko Ritala――ALD Chemistry: Overview and Future Challenges/ALD in Optical Applications
李爱东教授――Atomic Layer Deposition of Dielectric Films and Their Applications
陈鑫教授――Preparation, Assembly and Applications of Nanostructures
分会主持人――刘红侠教授
丁士进教授――Atomic-layer-deposited High-k Dielectrics for High Density Metal-insulator-metal Capacitors