Semiconductor devices. Micro-electromechanical devices - Electromechanical relaxation test method for freestanding conductive thin-films under room temperature
What is BS IEC 62047 ‑ 29 - Electromechanical relaxation test method for MEMS ?
BS IEC 62047 is an international standard that discusses semiconductor devices including microelectromechanical devices. The main aim of the IEC 62047 series is to provide entities involved with semiconductor technology with best industry techniques to demonstrate the reliability and performance of their devices and components.
BS IEC 62047 ‑ 29 is the 29 th