GSO IEC 62047-11:2021

Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems

GSO IEC 62047-11:2021 发布历史

GSO IEC 62047-11:2021由GSO 发布于 2021-07-01。

GSO IEC 62047-11:2021在国际标准分类中归属于: 31.080.99 其他半导体分立器件。

GSO IEC 62047-11:2021 的最新版本是哪一版？

最新版本是 GSO IEC 62047-11:2021 。

GSO IEC 62047-11:2021的历代版本如下：

• 2021年 GSO IEC 62047-11:2021

IEC 62047-11:2013 specifies the test method to measure the linear thermal expansion coefficients (CLTE) of thin free-standing solid (metallic, ceramic, polymeric, etc.) micro-electro-mechanical system (MEMS) materials with length between 0,1 mm and 1 mm and width between 10 micrometre and 1 mm and thickness between 0,1 micrometre and 1 mm, which are main structural materials used for MEMS, micromachines and others. This test method is applicable for the CLTE measurement in the temperature range from room temperature to 30 % of a material's melting temperature.

标准号

GSO IEC 62047-11:2021

发布

2021年

发布单位

GSO

当前最新

GSO IEC 62047-11:2021

 

 

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