Surface chemical analysis. Depth profiling. Methods for ion beam alignment and the associated measurement of current or current density for depth profiling in AES and XPS
1 Scope
This document specifies methods for the alignment of the ion beam to ensure good depth
resolution in sputter depth profiling and optimal cleaning of surfaces when using
inert gas ions in Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy
(XPS). These methods are of two types: one involves a Faraday cup to measure the ion
current; the other involves imaging methods. The Faraday cup method also specifies
the measurements of current density and current distributions in ion beams. The methods
are applicable for ion guns with beams with a spot size less than or equal to 1 mm
in diameter. The methods do not include depth resolution optimization.