GB/T 33523.603-2022
产品几何技术规范(GPS) 表面结构 区域法 第603部分:非接触(相移干涉显微)式仪器的标称特性
Geometrical product specifications (GPS)—Surface texture: Areal—Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments
GBT33523.603-2022, GB33523.603-2022