This International Standard specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials. The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.
BS ISO 18114-2003由英国标准学会 GB-BSI 发布于 2003-08-07,并于 2003-08-07 实施。
BS ISO 18114-2003 在中国标准分类中归属于: G73 表面活性剂,在国际标准分类中归属于: 71.040.40 化学分析。
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