ASTM F24-2009
表面颗粒状污染物的计数和测量标准方法

Standard Method for Measuring and Counting Particulate Contamination on Surfaces

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标准号

ASTM F24-2009

发布日期

2009年

实施日期

废止日期

无

中国标准分类号

Z10

国际标准分类号

17.040.20

发布单位

US-ASTM

代替标准

Reinstated

适用范围

1.1 This test method covers the size distribution analysis of particulate contamination, 5 x03BC;m or greater in size, either on, or washed from, the surface of small electron-device components. A maximum variation of two to one (x00B1;33 % of the average of two runs) should be expected for replicate counts on the same sample.

1.2 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.