Advanced technical ceramics - Methods of test for ceramic coatings - Part 4: Determination of chemical composition by electron probe microanalysis (EPMA)
This European Standard describes methods for chemical analysis of ceramic coatings by means of electron probe microanalysis (EPMA) using a scanning electron microscope (SEM) or an electron probe microanalyser.The methods described are limited to the examination of single layer coatings when the analysis is carried out normal to the sample surface, but graded and multilayer coatings may also be analysed in cross-section if the thickness of the individual layers or gradations are greater than the maximum width of the volume of material within which characteristic or fluorescent X-rays are generated.NOTE This method can also be used for the analysis of bulk ma