DIN EN ISO 25178-604-2013 产品几何技术规范(GPS).表面纹理:平面.第604部分:非接触式标称特征(连贯性扫描干涉法)仪器(ISO 25178-604-2013).德文版本EN ISO 25178-604-2013
Geometrical product specification (GPS) - Surface texture: Areal - Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments (ISO 25178-604:2013); German version EN ISO 25178-604:2013