DIN 477-9-1989DIN 2403-1984DIN 4768-1990DIN EN 10204-1995DIN EN ISO 9001-1994DIN EN ISO 9002-1994DIN EN ISO 9003-1994DIN EN ISO 9004-1-1994TRF ReiheBGR 120-1998BGR 132-1989WHG-1996DruckbehV-1989ElexV-1996TA Luft-1986EX-RL-1985TRB ReiheTRb
High-Purity/Ultra-High-Purity (HP-/UHP-) media (chemicals and gases) are being used more and more for many production purposes. The aim is to maintain the level of cleanliness between the point of supply (P.O.S.) and the point of entry (P.O.E.) or, respectively, to accept a reduction in purity only in certain defined areas where it is permissible. The purpose of this Guideline is to summarize knowledge regarding the design, construction, operation and monitoring of HP-/UHP-media supply systems. Cleanliness refers to residual contaminants such as particles, cations, anions, TOC and other specific parameters (foreign gases, humidity etc.). There is no information provided concerning cleanliness requirement conditions as these shall be determined by the respective user according to the intended utilization.