GB/T 38616-2020
Terminology for nano positioning and scaning stage
- Standard No.
- GB/T 38616-2020
- Language
- Chinese
- Release Date
- 2020
- Published By
- 国家市场监督管理总局、中国国家标准化管理委员会
- Lastest
- GB/T 38616-2020
- Scope
- This standard defines the term definition of nanopositioning and scanning platform (hereinafter referred to as platform). This standard applies to the definition of product parameters for nanopositioning and scanning platforms. 2 General terms
GB/T 38616-2020 history
- 2020 GB/T 38616-2020 Terminology for nano positioning and scaning stage