GB/T 38614-2020
Measuring method for nano positioning and scanning stage based on flexible hinge mechanism and piezo actuator
- Standard No.
- GB/T 38614-2020
- Language
- Chinese
- Release Date
- 2020
- Published By
- 国家市场监督管理总局、中国国家标准化管理委员会
- Lastest
- GB/T 38614-2020
GB/T 38614-2020 history
- 2020 GB/T 38614-2020 Measuring method for nano positioning and scanning stage based on flexible hinge mechanism and piezo actuator