This standard specifies the inspection method for gallium arsenide single crystal AB micro-defects. This standard applies to the inspection of GaAs single crystal AB micro-defect density (AB-EPD). The inspection surface is (100) surface. Measuring range is less than 5 X 10 cm
GB/T 18032-2000 history
2000GB/T 18032-2000 The inspecting method of AB microscopic defect in gallium arsenide single crystal