GB/T 18193-2000
Vacuum technology-Mass-spectrometer-type leak detector calibration (English Version)
- Standard No.
- GB/T 18193-2000
- Language
- Chinese, Available in English version
- Release Date
- 2000
- Published By
- General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
- Latest
- GB/T 18193-2000
- Scope
- This standard specifies the calibration procedure for mass spectrometer leak detectors. It is only suitable for calibrating leak detectors that place sensitive components in high vacuum systems. Therefore this method does not develop a complete acceptance test. This standard specifies the use of helium-4 as an exploration gas. But with proper precautions, other exploration gases such as argon-40 can be used. The application of this standard is limited by the fact that the leak detector cannot measure leaks with a leak rate less than 10
Pa·m ·s . This standard procedure proposes two main points for determining the minimum detectable leak rate and the minimum detectable concentration ratio. They are respectively applied to leak detectors with high vacuum and pressure greater than one atmospheric pressure.
GB/T 18193-2000 history
- 2000 GB/T 18193-2000 Vacuum technology-Mass-spectrometer-type leak detector calibration