This standard specifies the basic principles for the measurement of nanoscale lengths by scanning electron microscopy. Suitable for measuring the distance between points or lines from 10nm to 500nm.
GB/T 20307-2006 Referenced Document
JJF 1059-1999 Evaluation and Expression of Uncertainty in Measurement
GB/T 20307-2006 history
2006GB/T 20307-2006 General rules for nanometer-scale length measurement by SEM