GB/T 18994-2003
Gases for electronic industry--High purity chlorine (English Version)
- Standard No.
- GB/T 18994-2003
- Language
- Chinese, Available in English version
- Release Date
- 2003
- Published By
- General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
- Status
- 2015-07
- Replace By
- GB/T 18994-2014
- Latest
- GB/T 18994-2014
- Scope
- This standard specifies the technical requirements, test methods, and inspection rules for gaseous high-purity chlorine products used in the electronics industry. 1, 11t exhaust packaging, marking, transportation and storage, and safety requirements. This standard applies to high-purity chlorine products produced by physical adsorption and other processes using industrial liquid chlorine as raw material. This product is mainly used in high-tech fields such as large-scale integrated circuits, optical fibers, high-temperature superconductors, and aluminum processing. Molecular formula: Cl2. Relative molecular mass: 70.906 (according to the international relative atomic mass in 1999). Boiling point at 101.3 kPa: -34.05°C. Melting point at 101.3 kPa: - l01.0. c. Density of gas at 101.3 kPa and 20°C: 2.980 k9/m3.
GB/T 18994-2003 history
- 2014 GB/T 18994-2014 Gases for electronic industry.High purity chlorine
- 2003 GB/T 18994-2003 Gases for electronic industry--High purity chlorine