This standard specifies the test method for measuring the Al content in the AlGaAs epitaxial layer on the GaAs substrate by high-resolution X-ray diffraction. This method is suitable for the determination of the Al content in the AlGaAs epitaxial layer grown in the <001> direction of the undoped GaAs substrate. When using this method to measure the Al element content, the thickness of the AlGaAs epitaxial layer should be greater than 300 nm.
GB/T 24576-2009 history
2009GB/T 24576-2009 Test method for measuring the Al fraction in on AlGaAs substrates by high resolution X-ray diffraction