GB/T 24576-2009
Test method for measuring the Al fraction in on AlGaAs substrates by high resolution X-ray diffraction (English Version)

GB/T 24576-2009
Standard No.
GB/T 24576-2009
Language
Chinese, Available in English version
Release Date
2009
Published By
General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
Latest
GB/T 24576-2009
Scope
This standard specifies the test method for measuring the Al content in the AlGaAs epitaxial layer on the GaAs substrate by high-resolution X-ray diffraction. This method is suitable for the determination of the Al content in the AlGaAs epitaxial layer grown in the <001> direction of the undoped GaAs substrate. When using this method to measure the Al element content, the thickness of the AlGaAs epitaxial layer should be greater than 300 nm.

GB/T 24576-2009 history

  • 2009 GB/T 24576-2009 Test method for measuring the Al fraction in on AlGaAs substrates by high resolution X-ray diffraction



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