GB/T 4298-1984
The activation analysis method for the determination of elemental impurities in semiconductor silicon materials (English Version)

Standard No.

GB/T 4298-1984

Language

Chinese, Available in English version

Release Date

1984

Published By

General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China

Status

Withdraw 2017-12

Latest

GB/T 4298-1984

Scope

This standard applies to the determination of the content of metal impurity elements and non-metal impurity elements in single crystal silicon and polycrystalline silicon.

GB/T 4298-1984 history

• 1984 GB/T 4298-1984 The activation analysis method for the determination of elemental impurities in semiconductor silicon materials